Hydrazidoverbindungen des Niobs und Tantals im Kontext der Chemical Vapor Deposition von Refraktärmetallnitriden
Synthese und strukturelle sowie spektroskopische Charakterisierung von Hydrazido(1-)- und Hydrazido(2-)-Verbindungen des Niobs, Tantals, Molybdäns und Wolframs. Hierbei wurden Bis(hydrazido)-magnesiumverbindungen sowie gemischte Halogeno-hydrazido-magnesiumsalze, mono- und disilylierte Derivate des...
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| Format: | Dissertation |
| Sprog: | tysk |
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Philipps-Universität Marburg
2008
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| Online adgang: | PDF-Volltext |
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Synthesis and structural and spectroscopic characterization of hydrazido(1-) and hydrazido(2-) compounds of niobium, tantalum, molybdenum and tungsten. Here, bis(hydrazido)-magnesium compounds as well as mixed halogeno-hydrazido-magnesium salts, mono- and disilylated derivatives of 1,1-dimethylhydrazine were employed to introduce hydrazido ligands into group V and group VI chlorides and imido complexes. The obtained compounds are volatile and can be used as precursors in the CVD of refractory metal nitrides. Some of these compounds show ligand dynamics which were investigated NMR-spectroscopically.