1,4–Diazadiene Imido Complexes of Group V and VI Elements and Their Application in Chemical Vapour Deposition of TaN Films

The present work describes new perspectives in chemistry of 1,4-diaza-1,3-diene (R,R’–DAD) ligands. From the wide spectrum of described R,R’–DAD ligands 1,4-di-tert-butyl-1,4-diazabuta-1,3-diene (tBu,H–DAD or simply DAD) was chosen. This derivative has several advantages, namely, it is very simple t...

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Bibliographic Details
Main Author: Merkoulov, Alexei
Contributors: Sundermeyer, Jörg (Prof. Dr.) (Thesis advisor)
Format: Doctoral Thesis
Published: Philipps-Universität Marburg 2006
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Call Number: urn:nbn:de:hebis:04-z2006-01540
Publication Date: 2006-10-05
Date of Acceptance: 2005-10-27
Downloads: 90 (2023), 173 (2022), 171 (2021), 181 (2020), 137 (2019), 71 (2018)
License: https://rightsstatements.org/vocab/InC-NC/1.0/
Access URL: https://archiv.ub.uni-marburg.de/diss/z2006/0154