Simultaneous determination of local thickness and composition for ternary III-V semiconductors by aberration-corrected STEM

Scanning transmission electron microscopy (STEM) is a suitable method for the quantitative characterization of nanomaterials. For an absolute composition determination on an atomic scale, the thickness of the specimen has to be known locally with high accuracy. Here, we propose a method to determine...

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Autoren: Kükelhan, Pirmin, Beyer, Andreas, Firoozabadi, Saleh, Hepp, Thilo, Volz, Kerstin
Format: Artikel
Jezik:angleščina
Izdano: Philipps-Universität Marburg 2019
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