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1,4–Diazadiene Imido Complexes of Group V and VI Elements and Their Application in Chemical Vapour Deposition of TaN Films
The present work describes new perspectives in chemistry of 1,4-diaza-1,3-diene (R,R’–DAD) ligands. From the wide spectrum of described R,R’–DAD ligands 1,4-di-tert-butyl-1,4-diazabuta-1,3-diene (tBu,H–DAD or simply DAD) was chosen. This derivative has several advantages, namely, it is very simple t...
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| Format: | Dissertation |
| Idioma: | anglès |
| Publicat: |
Philipps-Universität Marburg
2006
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| Accés en línia: | PDF a text complet |
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