0500 Oau
1100 2022
2050 ##0##urn:nbn:de:hebis:04-z2023-00863
2051 ##0##10.17192/z2023.0086
3000 Pieck, Fabian
4000 Ab Initio Modelling of Chemical Vapor and Area‐Selective Atomic Layer Deposition - Developing an Automated Exploration of Surface Reaction Networks
4085 ##0##=s MB=u https://archiv.ub.uni-marburg.de/diss/z2023/0086=x H
5050 |540
5584 Metalorganic Vapor Phase Epitaxy (MOVPE)
5584 Atomic Layer Deposition (ALD)
5584 Chemie
5584 Density Functional Theory (DFT)
5584 Area Selective Atomic Layer Deposition (AS-A
opus:11060