Quantitative Scanning Transmission Electron Microscopy for III-V Semiconductor Heterostructures Utilizing Multi-Slice Image Simulations

Quantitative STEM can satisfy the demand of modern semiconductor device development for atomically resolved structural information. Thereby, quantitative evaluations can be based on STEM intensities only, a combination of STEM intensities with different methods or a comparison of STEM intensities to...

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Bibliographic Details

Main Author:	Kükelhan, Pirmin
Contributors:	Volz, Kerstin (Prof. Dr.) (Thesis advisor)
Format:	Doctoral Thesis
Language:	English
Published:	Philipps-Universität Marburg 2019
Subjects:	Physik III-V Halbleiter multi-slice simulations III-V semiconductors Halbleiter Bildsimulationen quantitative STEM Elektronenmikroskopie Quantitative Rastertransmissionselektronenmikroskopie Physics
Online Access:	PDF Full Text
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