Quantitative Scanning Transmission Electron Microscopy for III-V Semiconductor Heterostructures Utilizing Multi-Slice Image Simulations

Quantitative STEM can satisfy the demand of modern semiconductor device development for atomically resolved structural information. Thereby, quantitative evaluations can be based on STEM intensities only, a combination of STEM intensities with different methods or a comparison of STEM intensities to...

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Bibliographic Details
Main Author: Kükelhan, Pirmin
Contributors: Volz, Kerstin (Prof. Dr.) (Thesis advisor)
Format: Dissertation
Published: Philipps-Universität Marburg 2019
Online Access:PDF Full Text
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