On the mechanisms of hydrogen implantation induced silicon surface layer cleavage
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| Main Author: | |
|---|---|
| Format: | Doctoral Thesis |
| Language: | English |
| Published: |
Philipps-Universität Marburg
2001
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| Subjects: | |
| Online Access: | PDF Full Text |
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Internet
PDF Full Text| Call Number: |
urn:nbn:de:hebis:04-z2002-04033 |
|---|---|
| Publication Date: |
2003-08-06 |
| Date of Acceptance: |
2001-12-18 |
| Downloads: |
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| License: |
https://rightsstatements.org/vocab/InC-NC/1.0/ |
| Access URL: |
https://archiv.ub.uni-marburg.de/diss/z2002/0403 https://doi.org/10.17192/z2002.0403 |