Herstellung und elektronische Eigenschaften hydrogenierter amorpher Siliziumfilme, abgeschieden unter extremen Depositionsbedingungen
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Main Author: | |
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Format: | Doctoral Thesis |
Language: | German |
Published: |
Philipps-Universität Marburg
2004
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Subjects: | |
Online Access: | PDF Full Text |
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PDF Full TextCall Number: |
urn:nbn:de:hebis:04-z1998-00012 |
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Publication Date: |
2004-03-16 |
Date of Acceptance: |
1997-12-15 |
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License: |
https://rightsstatements.org/vocab/InC-NC/1.0/ |
Access URL: |
https://archiv.ub.uni-marburg.de/diss/z1998/0001 https://doi.org/10.17192/z1998.0001 |