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    1,4–Diazadiene Imido Complexes of Group V and VI Elements and Their Application in Chemical Vapour Deposition of TaN Films

    1,4–Diazadiene Imido Complexes of Group V and VI Elements and Their Application in Chemical Vapour Deposition of TaN Films by Merkoulov, Alexei

    Published 2006
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    Doctoral Thesis
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