Publikationsserver
Ab Initio Modelling of Chemical Vapor and Area‐Selective Atomic Layer Deposition - Developing an Automated Exploration of Surface Reaction Networks
In the present dissertation the surface reactivity of small molecules within the thin film growth by chemical vapor deposition and area-selective atomic layer deposition is studied by density functional theory. In a first part, an approach for an automated exploration of reaction networks is prese...
Na minha lista:
| Autor principal: | |
|---|---|
| Outros Autores: | |
| Formato: | Dissertation |
| Idioma: | inglês |
| Publicado em: |
Philipps-Universität Marburg
2022
|
| Assuntos: | |
| Acesso em linha: | Texto integral em PDF |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|
No references were found for this record.