Ab Initio Modelling of Chemical Vapor and Area‐Selective Atomic Layer Deposition - Developing an Automated Exploration of Surface Reaction Networks
In the present dissertation the surface reactivity of small molecules within the thin film growth by chemical vapor deposition and area-selective atomic layer deposition is studied by density functional theory. In a first part, an approach for an automated exploration of reaction networks is prese...
Spremljeno u:
Glavni autor: | |
---|---|
Daljnji autori: | |
Format: | Dissertation |
Jezik: | engleski |
Izdano: |
Philipps-Universität Marburg
2022
|
Teme: | |
Online pristup: | PDF cijeli tekst |
Oznake: |
Dodaj oznaku
Bez oznaka, Budi prvi tko označuje ovaj zapis!
|
No references were found for this record.