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Ab Initio Modelling of Chemical Vapor and Area‐Selective Atomic Layer Deposition - Developing an Automated Exploration of Surface Reaction Networks
In the present dissertation the surface reactivity of small molecules within the thin film growth by chemical vapor deposition and area-selective atomic layer deposition is studied by density functional theory. In a first part, an approach for an automated exploration of reaction networks is prese...
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| Format: | Dissertation |
| Idioma: | anglès |
| Publicat: |
Philipps-Universität Marburg
2022
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| Accés en línia: | PDF a text complet |
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