Quantitative Scanning Transmission Electron Microscopy for III-V Semiconductor Heterostructures Utilizing Multi-Slice Image Simulations

Quantitative STEM can satisfy the demand of modern semiconductor device development for atomically resolved structural information. Thereby, quantitative evaluations can be based on STEM intensities only, a combination of STEM intensities with different methods or a comparison of STEM intensities to...

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Bibliographic Details
Main Author: Kükelhan, Pirmin
Contributors: Volz, Kerstin (Prof. Dr.) (Thesis advisor)
Format: Dissertation
Language:English
Published: Philipps-Universität Marburg 2019
Physik
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Call Number: urn:nbn:de:hebis:04-z2019-04832
Downloads: 29 (2020), 20 (2019)
Publication Date: 2019-09-25
License: https://creativecommons.org/licenses/by-nc-sa/4.0
Access URL: https://archiv.ub.uni-marburg.de/diss/z2019/0483
https://doi.org/10.17192/z2019.0483