1,4–Diazadiene Imido Complexes of Group V and VI Elements and Their Application in Chemical Vapour Deposition of TaN Films

The present work describes new perspectives in chemistry of 1,4-diaza-1,3-diene (R,R’–DAD) ligands. From the wide spectrum of described R,R’–DAD ligands 1,4-di-tert-butyl-1,4-diazabuta-1,3-diene (tBu,H–DAD or simply DAD) was chosen. This derivative has several advantages, namely, it is very simple t...

Full description

Saved in:
Bibliographic Details
Main Author: Merkoulov, Alexei
Contributors: Sundermeyer, Jörg (Prof. Dr.) (Thesis advisor)
Format: Dissertation
Language:English
Published: Philipps-Universität Marburg 2006
Chemie
Subjects:
CVD
DAD
Online Access:PDF Full Text
Tags: Add Tag
No Tags, Be the first to tag this record!

Internet

PDF Full Text

Holdings details from
Call Number: urn:nbn:de:hebis:04-z2006-01540
Downloads: 123 (2019), 71 (2018), 42 (2017), 35 (2016)
Publication Date: 2006-10-05
License: According to UrhG § 31 (2), the author has granted the University Library Marburg the right of use for electronic publication on the Internet and for archiving on its archive server. He has declared that with the granting of the right of use according to UrhG § 31 (3) no exclusive rights of third parties are violated. All other rights for the exploitation of the publication remain with the author. https://rightsstatements.org/vocab/InC-NC/1.0/
Access URL: https://archiv.ub.uni-marburg.de/diss/z2006/0154
https://doi.org/10.17192/z2006.0154