1,4–Diazadiene Imido Complexes of Group V and VI Elements and Their Application in Chemical Vapour Deposition of TaN Films

The present work describes new perspectives in chemistry of 1,4-diaza-1,3-diene (R,R’–DAD) ligands. From the wide spectrum of described R,R’–DAD ligands 1,4-di-tert-butyl-1,4-diazabuta-1,3-diene (tBu,H–DAD or simply DAD) was chosen. This derivative has several advantages, namely, it is very simple t...

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Bibliographic Details
Main Author: Merkoulov, Alexei
Contributors: Sundermeyer, Jörg (Prof. Dr.) (Thesis advisor)
Format: Dissertation
Language:English
Published: Philipps-Universität Marburg 2006
Chemie
Subjects:
CVD
DAD
Online Access:PDF Full Text
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