On the mechanisms of hydrogen implantation induced silicon surface layer cleavage
Furkejuvvon:
Váldodahkki: | |
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Materiálatiipa: | Dissertation |
Giella: | eaŋgalasgiella |
Almmustuhtton: |
Philipps-Universität Marburg
2001
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Fáttát: | |
Liŋkkat: | PDF-ollesdeaksta |
Fáddágilkorat: |
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Interneahtta
PDF-ollesdeakstaHildobáiki: |
urn:nbn:de:hebis:04-z2002-04033 |
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Almmustuhttinbeaivi: |
2003-08-06 |
Datum der Annahme: |
2001-12-18 |
Downloads: |
54 (2024), 99 (2023), 117 (2022), 159 (2021), 148 (2020), 370 (2019), 113 (2018) |
Lizenz: |
https://rightsstatements.org/vocab/InC-NC/1.0/ |
Liŋka materiálii: |
https://archiv.ub.uni-marburg.de/diss/z2002/0403 https://doi.org/10.17192/z2002.0403 |