Composition determination for quaternary III-V semiconductors by aberration-corrected STEM

Quantitative scanning transmission electron microscopy (STEM) is a powerful tool for the characterization of nano-materials. Absolute composition determination for ternary III–V semiconductors by direct comparison of experiment and simulation is well established. Here, we show a method to determine...

Descripción completa

Guardado en:
Detalles Bibliográficos
Autores principales: Duschek, Lennart, Beyer, Andreas, Oelerich, Jan Oliver, Volz, Kerstin
Formato: Artículo
Lenguaje:inglés
Publicado: Philipps-Universität Marburg 2019
Materias:
Acceso en línea:Texto Completo PDF
Etiquetas: Agregar Etiqueta
Sin Etiquetas, Sea el primero en etiquetar este registro!
Descripción
Sumario:Quantitative scanning transmission electron microscopy (STEM) is a powerful tool for the characterization of nano-materials. Absolute composition determination for ternary III–V semiconductors by direct comparison of experiment and simulation is well established. Here, we show a method to determine the composition of quaternary III–V semiconductors with two elements on each sub lattice from the intensities of one STEM image. As an example, this is applied to (GaIn)(AsBi). The feasibility of the method is shown in a simulation study that also explores the influence of detector angles and specimen thickness. Additionally, the method is applied to an experimental STEM image of a (GaIn)(AsBi) quantum well grown by metal organic vapour phase epitaxy. The obtained concentrations are in good agreement with X-ray diffraction and photoluminescence results.
Descripción Física:21 Seiten
DOI:10.17192/es2021.0021